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Rev. 4/19/11
Today’s News
The world’s first 3-D Tri-Gate transistors on a production technology
New 22nm transistors have an unprecedented combination of power savings and
performance gains.
These benefits will enable new innovations across a broad range of devices from
the smallest handheld devices to powerful cloud-based servers.
The transition to 3-D transistors continues the pace of technology advancement,
fueling Moore’s Law for years to come.
The world’s first demonstration of a 22nm microprocessor -- code-named Ivy Bridge
-- that will be the first high-volume chip to use 3-D Tri-Gate transistors.
Energy-Efficient Performance Built on Moore’s Law
1
65nm 45nm 32nm 22nm
1x normalized)
Leakage Power (
ransistor Transistor
0.1x Active er
T er >
er50% p
0.01x Power
Low reduction
Low Active
0.001x Constant Performance
0.1 65nm 45nm 32nm 22nm
Higher Transistor Performance (Switching Speed) Planar Planar Planar Tri-Gate
Source: Intel 22 nm Tri-Gate transistors increase the benefit
from a new technology generation
Source: Intel
Transistor Innovations Enable Technology Cadence
2003
90 nm
2005
65 nm
2007
45 nm
2009
32 nm
2011
22 nm
Invented SiGe
Strained Silicon
Strained Silicon
nd
2 Gen.
SiGe
Strained Silicon
Invented
Gate-Last
High-k Metal Gate
nd
2 Gen.
Gate-Last
High-k Metal Gate
First to
Implement Tri-Gate
High k Metal gate
Tri-Gate
Transistor Innovations Enable Cost Benefits
of Moore’s Law to Continue
1
0.1
$ / Transistor
(relative to 0.35um)
0.01
200mm
300mm
Source: Intel
0.001 .35um .25um .18um .13um 90nm 65nm 45nm 32nm 22nm 14nm 10nm
22 nm Manufacturing Fabs
D1D -- Oregon
D1C -- Oregon
Fab 32 -- Arizona
Fab 28 -- Israel Fab 12 -- Arizona
22nm upgrades to be completed 2011-12
Tri-Gate Invented
Tri-Gate Achievement Results from
Long Term Commitment to Research
Pathfinding
Internal
Research Development
Tri-Gate Selected for
22nm node
CE! transfer
Manufacturing
Tri-Gate Mfg
Single-fin transistor demonstrated
Multi-fin transistor demonstrated
Tri-gate SRAM cells
demonstrated
Tri-gate RMG
process flow
developed
Tri-gate optimized
for HVM
Bringing innovative technologies to HVM is the result of a
highly coordinated internal research-development-manufacturing pipeline
“For years we have seen limits to how small transistors can get,”
said Gordon E. Moore. “This change in the basic structure is
a truly revolutionary approach, and one that should allow
Moore’s Law, and the historic pace of innovation, to continue.”
22 nm 3-D Tri-Gate Transistor
Source: Intel
3-D Tri-Gate transistors form conducting channels on three sides
of a vertical fin structure, providing “fully depleted” operation
Transistors have now entered the third dimension!
22 nm 3-D Tri-Gate Transistor
Source: Intel
Gates
Fins
32 nm Planar Transistors
22 nm Tri-Gate Transistors
Source: Intel
Std vs. Fully Depleted Transistors
Bulk Transistor
Gate
Oxide
Source
Gate
Inversion Layer
Drain
Depletion Region
Silicon Substrate
Substrate voltage exerts some electrical influence on the inversion layer (where source-drain current flows)
The influence of substrate voltage degrades electrical sub-threshold slope (transistor turn-off characteristics)
NOT fully depleted
Source: Intel
Std vs.
Read the full Risk Factors.